Keyword : Character Projection


A Structured Routing Architecture for Practical Application of Character Projection Method in Electron-Beam Direct Writing
Rimon IKENO Takashi MARUYAMA Satoshi KOMATSU Tetsuya IIZUKA Makoto IKEDA Kunihiro ASADA 
Publication:   IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences
Publication Date: 2014/08/01
Vol. E97-A  No. 8 ; pp. 1688-1698
Type of Manuscript:  PAPER
Category: VLSI Design Technology and CAD
Keyword: 
Electron Beam Direct WritingCharacter ProjectionroutinginterconnectVIA
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