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| Keyword : CVD
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Structure Transformation of Bended Diamond-Like Carbon Free-Space Nanowiring by Ga Focused-Ion-Beam Irradiation
Ken-ichiro NAKAMATSU Shinji MATSUI | Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 2016/03/01
Vol. E99-C
No. 3 ;
pp. 365-370
Type of Manuscript:
Special Section PAPER (Special Section on Progress towards System Nanotechnology)
Category:
Keyword:
focused-ion-beam, CVD, DLC, nanowiring, | | | Summary | Full Text:PDF(932.5KB) | |
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Carbon Nanotube Technologies for LSI via Interconnects
Yuji AWANO | Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 2006/11/01
Vol. E89-C
No. 11 ;
pp. 1499-1503
Type of Manuscript:
INVITED PAPER (Special Section on Novel Device Architectures and System Integration Technologies)
Category:
Keyword:
carbon nanotube, interconnect, CVD, nanotechnology, | | | Summary | Full Text:PDF(2.9MB) | |
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