Keyword : CIM


Unified Process Flow Management System for ULSI Semiconductor Manufacturing
Etsuo FUKUDA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3 ; pp. 282-289
Type of Manuscript:  Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: CIM/CAM
Keyword: 
CIMCADPDLprocess specificationsimulation
 Summary | Full Text:PDF

A Scalable and Flexible CIM System with Precise and Quick Scheduler for ASIC
Kou WADA Tsuneo OKUBO Satoshi TAZAWA Tetsuma SAKURAI Eisuke ARAI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1995/03/25
Vol. E78-C  No. 3 ; pp. 229-235
Type of Manuscript:  Special Section PAPER (Special Issue on Sub-1/4 Micron Device and Process Technologies)
Category: 
Keyword: 
integrated electronicsinstrumentation and controlCIMASICFA
 Summary | Full Text:PDF