Publication:
Publication Date: 2017/02/01
Vol. E100-C
No. 2 ;
pp. 156-160
Type of Manuscript:
INVITED PAPER (Special Section on Fabrication Technologies Supporting the Photonic/Nanostructure Devices)
Category:
Keyword:
heterogeneous integration, room-temperature bonding, surface-activated bonding, Au-Au bonding, |
