Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 2010/05/01
Vol. E93-C
No. 5 ;
pp. 590-595
Type of Manuscript:
Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: Flash/Advanced Memory
Keyword:
SONOS, SOHOS, flash memory, high-k, HfO2, nonvolatile memory, Atomic Layer Deposition, |
