Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1998/04/25 Vol. E81-CNo. 4 ;
pp. 497-504 Type of Manuscript: Special Section PAPER (Special Issue on Advanced Memory Devices Using High-Dielectric-Constant and Ferroelectric Thin Films) Category: Keyword: chemical vapor deposition, (Ba,Sr)TiO3, annealing, dielectric constant, dielectric breakdown,
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1994/03/25 Vol. E77-CNo. 3 ;
pp. 385-391 Type of Manuscript: Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies) Category: Device Technology Keyword: (Ba,Sr)TiO3, ferroelectric, DRAM, sputtering, grain size effect,
