Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 2008/10/01
Vol. E91-C
No. 10 ;
pp. 1658-1662
Type of Manuscript:
Special Section PAPER (Special Section on Functional Thin Films for Optical Applications)
Category:
Keyword:
facing-target sputtering, indium tin oxide, low damage, organic layer, shield, γ-electrons, |
