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| Yukio YASUDA
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Sub-10 nm Multi-Nano-Pillar Type Vertical MOSFET
Tetsuo ENDOH Koji SAKUI Yukio YASUDA | Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 2010/05/01
Vol. E93-C
No. 5
pp. 557-562
Type of Manuscript:
Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: Emerging Devices
Keyword:
vertical MOSFET, 3D structured device, MOSFET, LSI, | | | Summary | Full Text:PDF | |
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