Yukihiko NAKATA


Design of 1 m2 Order Plasma Excitation Single-Layer Slotted Waveguide Array with Conducting Baffles and Quartz Glass Strips Using the GSM-MoM Analysis
Takuichi HIRANO Kimio SAKURAI Jiro HIROKAWA Makoto ANDO Tetsuya IDE Atsushi SASAKI Kazufumi AZUMA Yukihiko NAKATA 
Publication:   IEICE TRANSACTIONS on Communications
Publication Date: 2006/05/01
Vol. E89-B  No. 5  pp. 1627-1635
Type of Manuscript:  PAPER
Category: Antennas and Propagation
Keyword: 
slotted waveguide arraysunit cellplasmageneralized scattering matrix methodmethod of momentsbaffles
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Low-Temperature Gate Insulator for Poly-Si Thin Film Transistors by Combination of Photo-Oxidation and Plasma Enhanced Chemical Vapor Deposition Using Tetraethylorthosilicate and O2 Gases
Yukihiko NAKATA Tetsuya OKAMOTO Toshimasa HAMADA Takashi ITOGA Yutaka ISHII 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2002/11/01
Vol. E85-C  No. 11  pp. 1849-1853
Type of Manuscript:  Special Section PAPER (Special Issue on Electronic Displays)
Category: Active Matrix Displays
Keyword: 
oxidationpoly-SiTFTgate insulatorSiO2
 Summary | Full Text:PDF