Yuichi UTSUMI


Fabrication of Integrated PTFE-Filled Waveguide Butler Matrix for Short Millimeter-Wave by SR Direct Etching
Mitsuyoshi KISHIHARA Masaya TAKEUCHI Akinobu YAMAGUCHI Yuichi UTSUMI Isao OHTA 
Publication:   
Publication Date: 2018/06/01
Vol. E101-C  No. 6  pp. 416-422
Type of Manuscript:  PAPER
Category: Microwaves, Millimeter-Waves
Keyword: 
microstructureX-ray lithographydielectric loaded waveguidesButler matrixmillimeter wave circuits
 Summary | Full Text:PDF(1.2MB)

Design and Fabrication of PTFE-Filled Waveguide Components by SR Direct Etching
Mitsuyoshi KISHIHARA Hiroaki IKEUCHI Yuichi UTSUMI Tadashi KAWAI Isao OHTA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2012/01/01
Vol. E95-C  No. 1  pp. 122-129
Type of Manuscript:  PAPER
Category: Microwaves, Millimeter-Waves
Keyword: 
X-ray lithographybandpass filtersdirectional couplerssputteringdielectric materials
 Summary | Full Text:PDF(2.3MB)

Synchrotron Radiation Stimulated Evaporation of a-SiO2 Films and Its Application for Si Surface Cleaning
Housei AKAZAWA Yuichi UTSUMI Jun-ichi TAKAHASHI Tsuneo URISU 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/07/25
Vol. E75-C  No. 7  pp. 781-789
Type of Manuscript:  Special Section PAPER (Special Issue on Ultra Clean Technology)
Category: 
Keyword: 
photostimulated evaporationa-SiO2surface cleaninggas-source MBE
 Summary | Full Text:PDF(1MB)