Yoji MASHIKO


Characterization of Extrinsic Oxide Breakdown on Thin Dielectric Oxide
Katsuya SHIGA Junko KOMORI Masafumi KATSUMATA Akinobu TERAMOTO Yoji MASHIKO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/04/25
Vol. E82-C  No. 4  pp. 589-592
Type of Manuscript:  Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category: 
Keyword: 
oxide reliabilityextrinsic oxide breakdownTDDBthin oxideactivation energy
 Summary | Full Text:PDF(484.2KB)

Reliability Evaluation of Thin Gate Oxide Using a Flat Capacitor Test Structure
Masafumi KATSUMATA Jun-ichi MITSUHASHI Kiyoteru KOBAYASHI Yoji MASHIKO Hiroshi KOYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/02/25
Vol. E79-C  No. 2  pp. 206-210
Type of Manuscript:  Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category: Reliability Analysis
Keyword: 
test structurevery low-level currentatto amperesmeasurement technique
 Summary | Full Text:PDF(388.8KB)