Weiwei SHAN


A Novel Combined Proportional-Derivative Control for Electrostatic MEMS Mirror Actuation
Weiwei SHAN Xin CHEN 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2011/09/01
Vol. E94-C  No. 9  pp. 1486-1489
Type of Manuscript:  BRIEF PAPER
Category: Electronic Instrumentation and Control
Keyword: 
MEMS micro-mirrorelectrostatic actuationclosed-loop control
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