Tsunao ONO


High Responsivity, Low Dark Current, and Highly Reliable Operation of InGaAlAs Waveguide Photodiodes for Optical Hybrid Integration
Hitoshi NAKAMURA Masato SHISHIKURA Shigehisa TANAKA Yasunobu MATSUOKA Tsunao ONO Takao MIYAZAKI Shinji TSUJI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/01/25
Vol. E80-C  No. 1  pp. 41-46
Type of Manuscript:  Special Section PAPER (Special Issue on Devices, Packaging Technology, and Subsystems for the Optical Access Network)
Category: 
Keyword: 
optical accessoptical platformhybrid integrationplanar lightwave circuitwaveguide photodiodephotodiodemolecular beam epitaxypassivationreliability
 Summary | Full Text:PDF(582.3KB)

Effects of 50 to 200-keV Electrons by BEASTLI Method on Semiconductor Devices
Fumio MIZUNO Satoru YAMADA Tsunao ONO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3  pp. 392-397
Type of Manuscript:  Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: Device Issues
Keyword: 
semiconductor deviceswafer inspectionscanning electron microscopehigh-energy electron beamdevice damagesurface chargingBEASTLI
 Summary | Full Text:PDF(419.3KB)