| Toshio ITO
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A Novel Electron Beam Resist System Convertible into Silicate Glass Toshio ITO Miwa SAKATA Maki KOSUGE | Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 1993/04/25
Vol. E76-C
No. 4
pp. 588-593
Type of Manuscript:
Special Section PAPER (Special Issue on Sub-Half Micron Si Device and Process Technologies) Category: Process Technology Keyword: electron beam resist, glass, poly (siloxane), SiO2, O2-RIE, | | Summary | Full Text:PDF(631.9KB) | |
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