Toru NASU


Application of Ferroelectric Thin Films to Si Devices
Koji ARITA Eiji FUJII Yasuhiro SHIMADA Yasuhiro UEMOTO Masamichi AZUMA Shinichiro HAYASHI Toru NASU Atsuo INOUE Akihiro MATSUDA Yoshihisa NAGANO Shin-ich KATSU Tatsuo OTSUKI Gota KANO Larry D. McMILLAN Carlos A. Paz de ARAUJO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/25
Vol. E77-C  No. 3  pp. 392-398
Type of Manuscript:  Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: Device Technology
Keyword: 
semiconductor materials and devicesmaterialsintegrated electronicsrecording and memory technologies
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