| Tetsuma SAKURAI
|
|
|
|
|
|
|
|
|
Semi-Insulating Film Deposition at Lower Substrate-Temperatures Using Ar -Beam Sputtering Tetsuma SAKURAI | Publication: IEICE TRANSACTIONS (1976-1990)
Publication Date: 1984/12/25
Vol. E67-E
No. 12
pp. 657-658
Type of Manuscript:
LETTER Category: Semiconductors Keyword:
| | Summary | Full Text:PDF | |
|
|