Takefumi OGUMA

Design, Process, and Evaluation of a Tunable Optical Fabry-Perrot Filter Using a Silicon Capacitive Pressure Sensor
Kenichiro SUZUKI Takefumi OGUMA Tetsuji UEDA Takashi SHIBUYA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2000/09/25
Vol. E83-C  No. 9  pp. 1435-1440
Type of Manuscript:  Special Section PAPER (Special Issue on Current Electromechanical Devices and Their Materials with Recent Innovations)
tunable optical filterFabry-Perrotcapacitive pressure sensorboron-doped siliconmicromachining
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