Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2005/05/01 Vol. E88-CNo. 5pp. 1020-1024 Type of Manuscript: Special Section PAPER (Joint Special Section on Recent Progress in Optoelectronics and Communications) Category: Optical Passive Devices and Modules Keyword: silicon-cantilever, fatigue, S-N curve, Weibull distribution, FIT number,