Takashi MAKIMURA


Fabrication of Small AlGaAs/GaAs HBT's for lntegrated Circuits Using New Bridged Base Electrode Technology
Takumi NITTONO Koichi NAGATA Yoshiki YAMAUCHI Takashi MAKIMURA Hiroshi ITO Osaake NAKAJIMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/09/25
Vol. E77-C  No. 9  pp. 1455-1463
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
heterojunction bipolar transistorself-aligned structureoxygen-ion implantationzinc diffusioncarbon doping
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