Takashi FUYUKI


Reliability of Low Temperature Poly-Si GOLD (Gate-Overlapped LDD) Structure TFTs
Tetsuo KAWAKITA Hidehiro NAKAGAWA Yukiharu URAOKA Takashi FUYUKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2002/11/01
Vol. E85-C  No. 11  pp. 1854-1859
Type of Manuscript:  Special Section PAPER (Special Issue on Electronic Displays)
Category: Active Matrix Displays
Keyword: 
low temperature poly-SiTFTreliabilityGOLDsystem on panel
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Deposition of High-Quality Silicon Dioxide by Remote Plasma CVD Technique
Takashi FUYUKI Takeshi FURUKAWA Tohru OKA Hiroyuki MATSUNAMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/09/25
Vol. E75-C  No. 9  pp. 1013-1018
Type of Manuscript:  Special Section PAPER (Special Issue on Silicon Devices and Materials)
Category: 
Keyword: 
remote plasma CVDSiO2
 Summary | Full Text:PDF