Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1998/04/25 Vol. E81-CNo. 4pp. 497-504 Type of Manuscript: Special Section PAPER (Special Issue on Advanced Memory Devices Using High-Dielectric-Constant and Ferroelectric Thin Films) Category: Keyword: chemical vapor deposition, (Ba,Sr)TiO3, annealing, dielectric constant, dielectric breakdown,