Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 2013/09/01
Vol. E96-C
No. 9
pp. 1097-1103
Type of Manuscript:
INVITED PAPER (Special Section on Recent Development of Electro-Mechanical Devices — Papers selected from International Session on Electro-Mechanical Devices 2012 (IS-EMD2012) and other recent research results —)
Category:
Keyword:
carbon nanotubes, contact surface, MEMS switching surface, fine transfer mechanism, contact resistance, |