Shuji NAKATA


Self-Alignment Process Using Liquid Resin for Assembly of Electronic or Optoelectronic Devices
Kozo FUJIMOTO Jong-Min KIM Shuji NAKATA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2001/12/01
Vol. E84-C  No. 12  pp. 1967-1974
Type of Manuscript:  PAPER
Category: Optoelectronics
Keyword: 
joint geometryresinself-alignmentsurface tensionOE-MCMs
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Fabrication of Silicon Dioxide Electrets by Plasma CVD Process for Microsystems, and Evaluation of Their Long-Term Charge Stability
Mitsuo ICHIYA Takuro NAKAMURA Shuji NAKATA Jacques LEWINER 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/01/25
Vol. E80-C  No. 1  pp. 174-183
Type of Manuscript:  PAPER
Category: Components
Keyword: 
microsystemssensorsactuatorselectrostatic fieldelectretsilicon dioxidecharge stabilitythermally stimulated current
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The Long-Term Charge Storage Mechanism of Silicon Dioxide Electrets for Microsystems
Mitsuo ICHIYA Takuro NAKAMURA Shuji NAKATA Jacques LEWINER 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/10/25
Vol. E79-C  No. 10  pp. 1462-1466
Type of Manuscript:  PAPER
Category: Materials
Keyword: 
electretsilicon dioxideplasma chemical vapor depositioncharge stabilitythermally stimulated currentelectron spin resonance
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