Shuichi NAGASAWA


Fabrication Process for Superconducting Digital Circuits
Mutsuo HIDAKA Shuichi NAGASAWA 
Publication:   
Publication Date: 2021/09/01
Vol. E104-C  No. 9  pp. 405-410
Type of Manuscript:  INVITED PAPER (Special Section on Fabrication of Superconductor Devices; Key Technology in Superconductor Electronics)
Category: 
Keyword: 
superconducting integrated circuitsJosephson junctionfabrication processcontrollabilityuniformitydefect density
 Summary | Full Text:PDF

Planarized Nb 4-Layer Fabrication Process for Superconducting Integrated Circuits and Its Fabricated Device Evaluation
Shuichi NAGASAWA Masamitsu TANAKA Naoki TAKEUCHI Yuki YAMANASHI Shigeyuki MIYAJIMA Fumihiro CHINA Taiki YAMAE Koki YAMAZAKI Yuta SOMEI Naonori SEGA Yoshinao MIZUGAKI Hiroaki MYOREN Hirotaka TERAI Mutsuo HIDAKA Nobuyuki YOSHIKAWA Akira FUJIMAKI 
Publication:   
Publication Date: 2021/09/01
Vol. E104-C  No. 9  pp. 435-445
Type of Manuscript:  Special Section PAPER (Special Section on Fabrication of Superconductor Devices; Key Technology in Superconductor Electronics)
Category: 
Keyword: 
superconducting fabrication technologyNb/AlOx/Nb Josephson junctioncaldera planarizationmulti-layer structuresingle-flux quantum logicadiabatic quantum flux parametron logiccell-based designdiagnostic shift-registers
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Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation
Shuichi NAGASAWA Kenji HINODE Tetsuro SATOH Mutsuo HIDAKA Hiroyuki AKAIKE Akira FUJIMAKI Nobuyuki YOSHIKAWA Kazuyoshi TAKAGI Naofumi TAKAGI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2014/03/01
Vol. E97-C  No. 3  pp. 132-140
Type of Manuscript:  INVITED PAPER (Special Section on Leading-Edge Technology of Superconductor Large-Scale Integrated Circuits)
Category: 
Keyword: 
superconducting fabrication technologyNb/AlOx/Nb Josephson junctionsingle flux quantumplanarizationshift register
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Large-Scale Integrated Circuit Design Based on a Nb Nine-Layer Structure for Reconfigurable Data-Path Processors
Akira FUJIMAKI Masamitsu TANAKA Ryo KASAGI Katsumi TAKAGI Masakazu OKADA Yuhi HAYAKAWA Kensuke TAKATA Hiroyuki AKAIKE Nobuyuki YOSHIKAWA Shuichi NAGASAWA Kazuyoshi TAKAGI Naofumi TAKAGI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2014/03/01
Vol. E97-C  No. 3  pp. 157-165
Type of Manuscript:  INVITED PAPER (Special Section on Leading-Edge Technology of Superconductor Large-Scale Integrated Circuits)
Category: 
Keyword: 
advanced processcell-based design techniquehigh-end computinglarge-scale integrationrapid single-flux-quantum circuits
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100 GHz Demonstrations Based on the Single-Flux-Quantum Cell Library for the 10 kA/cm2 Nb Multi-Layer Process
Yuki YAMANASHI Toshiki KAINUMA Nobuyuki YOSHIKAWA Irina KATAEVA Hiroyuki AKAIKE Akira FUJIMAKI Masamitsu TANAKA Naofumi TAKAGI Shuichi NAGASAWA Mutsuo HIDAKA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2010/04/01
Vol. E93-C  No. 4  pp. 440-444
Type of Manuscript:  Special Section PAPER (Special Section on Frontiers of Superconductive Electronics)
Category: Digital Applications
Keyword: 
single flux quantum circuitJosephson junctioncell libraryadder
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Improvements in Fabrication Process for Nb-Based Single Flux Quantum Circuits in Japan
Mutsuo HIDAKA Shuichi NAGASAWA Kenji HINODE Tetsuro SATOH 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/03/01
Vol. E91-C  No. 3  pp. 318-324
Type of Manuscript:  INVITED PAPER (Special Section on Recent Progress in Superconductive Digital Electronics)
Category: 
Keyword: 
superconductive circuitJosephson junctionfabrication processSFQ (Single Flux Quantum) circuitNb/AlOx/Nb junction
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Pattern-Size-Free Planarization for Multilayered Large-Scale SFQ Circuits
Kenji HINODE Shuichi NAGASAWA Masao SUGITA Tetsuro SATOH Hiroyuki AKAIKE Yoshihiro KITAGAWA Mutsuo HIDAKA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/12/01
Vol. E86-C  No. 12  pp. 2511-2513
Type of Manuscript:  LETTER
Category: Superconductive Electronics
Keyword: 
planarizationreversal maskNb SFQmultilevel wiring
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Single Flux Quantum Multistage Decimation Filters
Haruhiro HASEGAWA Tatsunori HASHIMOTO Shuichi NAGASAWA Satoru HIRANO Kazunori MIYAHARA Youichi ENOMOTO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/01/01
Vol. E86-C  No. 1  pp. 2-8
Type of Manuscript:  INVITED PAPER (Special Issue on Superconductor Digital/Analog Circuit Technologies)
Category: LTS Digital Applications
Keyword: 
single flux quantumsinc filterdecimation filterJosephson junction
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Design of SFQ Circuits and Their Measurement
Kazunori MIYAHARA Shuichi NAGASAWA Haruhiro HASEGAWA Tatsunori HASHIMOTO Hideo SUZUKI Youichi ENOMOTO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2002/03/01
Vol. E85-C  No. 3  pp. 603-607
Type of Manuscript:  INVITED PAPER (Special Issue on Superconductive Electronics)
Category: Digital Devices and Their Applications
Keyword: 
AD converterdecimation filtersuperconducting memorySFQ circuitsigma-delta modulator
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Superconducting Technology for Digital Applications Using Niobium Josephson Junctions
Shuichi TAHARA Hideaki NUMATA Shinichi YOROZU Yoshihito HASHIMOTO Shuichi NAGASAWA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2000/01/25
Vol. E83-C  No. 1  pp. 60-68
Type of Manuscript:  INVITED PAPER (Special Issue on Superconductive Devices and Systems)
Category: Digital Applications
Keyword: 
Josephson junctionsplanarizationmoat structurememorynetwork
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Josephson Memory Technology
Suichi TAHARA Shuichi NAGASAWA Hideaki NUMATA Yoshihito HASHIMOTO Shinichi YOROZU 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/09/25
Vol. E79-C  No. 9  pp. 1193-1199
Type of Manuscript:  INVITED PAPER (Special Issue on Toward Digital and Analog Applications of Superconductors)
Category: Superconductive digital integrated circuits
Keyword: 
Josephsonmemoryflux trapbuilt-in self testing
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A Resistor Coupled Josephson Polarity-Convertible Driver
Shuichi NAGASAWA Shuichi TAHARA Hideaki NUMATA Yoshihito HASHIMOTO Sanae TSUCHIDA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/08/25
Vol. E77-C  No. 8  pp. 1176-1180
Type of Manuscript:  Special Section PAPER (Special Section on Superconducting Devices)
Category: LTS
Keyword: 
superconductive electronicsJosephson devicedriverlow temperature device
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