Sho SASAKI


Micro Mirror Arrays for Improved Sensitivity of Thermopile Infrared Sensors
Makoto OHIRA Makoto MORIGUCHI Sho SASAKI Masatoshi OBA Tomoyuki TAKAHATA Isao SHIMOYAMA Masafumi KIMATA 
Publication:   C - Abstracts of IEICE TRANSACTIONS on Electronics (Japanese Edition)
Publication Date: 2011/11/01
Vol. J94-C  No. 11  pp. 433-440
Type of Manuscript:  Special Section PAPER (Special Issue on High-speed & High-density Packaging and Integration Technologies for Microelectronic Devices)
Category: 
Keyword: 
micro mirrorthermopileinfrared sensorswafer level package
 Summary | Full Text(in Japanese):PDF(1.3MB)

Properties of Insulator Using O3-TEOS CVD for MEMS TSV Electrodes
Akinobu KANAI Makoto MORIGUCHI Sho SASAKI Masatoshi OBA 
Publication:   C - Abstracts of IEICE TRANSACTIONS on Electronics (Japanese Edition)
Publication Date: 2009/11/01
Vol. J92-C  No. 11  pp. 640-645
Type of Manuscript:  Special Section PAPER (Special Issue on Advanced Packging and Environmentally Conscious Packaging Technologies in Next-Generation Electronic Equipment)
Category: 
Keyword: 
TSVO3-TEOSWLP
 Summary | Full Text(in Japanese):PDF(537.5KB)