Shinya MORITA


In-line Process Monitoring for Amorphous Oxide Semiconductor TFT Fabrication using Microwave-detected Photoconductivity Decay Technique
Hiroshi GOTO Hiroaki TAO Shinya MORITA Yasuyuki TAKANASHI Aya HINO Tomoya KISHI Mototaka OCHI Kazushi HAYASHI Toshihiro KUGIMIYA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2014/11/01
Vol. E97-C  No. 11  pp. 1055-1062
Type of Manuscript:  INVITED PAPER (Special Section on Electronic Displays)
Category: 
Keyword: 
oxide semiconductorthin film transistormicrowave-detected photoconductivity decayin-line process monitoring
 Summary | Full Text:PDF(2.1MB)

Application of Microwave Photoconductivity Decay Method to Characterization of Amorphous In-Ga-Zn-O Films
Satoshi YASUNO Takashi KITA Shinya MORITA Aya HINO Kazushi HAYASHI Toshihiro KUGIMIYA Shingo SUMIE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2012/11/01
Vol. E95-C  No. 11  pp. 1724-1729
Type of Manuscript:  INVITED PAPER (Special Section on Electronic Displays)
Category: 
Keyword: 
microwave photoconductivity decaya-IGZOoxide semiconductorphotoconductivity response
 Summary | Full Text:PDF(1.8MB)

Effects of Additive Elements on TFT Characteristics in Amorphous IGZO Films under Light Illumination Stress
Shinya MORITA Satoshi YASUNO Aya MIKI Toshihiro KUGIMIYA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2011/11/01
Vol. E94-C  No. 11  pp. 1739-1744
Type of Manuscript:  INVITED PAPER (Special Section on Electronic Displays)
Category: 
Keyword: 
thin-film-transistoroxide semiconductor trap densitystability
 Summary | Full Text:PDF(1.6MB)

Separation by Bonding Si Islands (SBSI) for Advanced CMOS LSI Applications
Takashi YAMAZAKI Shun-ichiro OHMI Shinya MORITA Hiroyuki OHRI Junichi MUROTA Masao SAKURABA Hiroo OMI Tetsushi SAKAI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2005/04/01
Vol. E88-C  No. 4  pp. 656-661
Type of Manuscript:  Special Section PAPER (Special Section on Fundamental and Application of Advanced Semiconductor Devices)
Category: Si Devices and Processes
Keyword: 
silicon on insulator (SOI) waferpatterned SOISiGeselective etchingMOSFET
 Summary | Full Text:PDF(1.3MB)