Ryutaro AZUMI


Piezoelectric Microcantilever Array for Multiprobe Scanning Force Microscopy
Toshihiro ITOH Ryutaro AZUMI Tadatomo SUGA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/02/25
Vol. E80-C  No. 2  pp. 269-273
Type of Manuscript:  Special Section PAPER (Special Issue on Micromachine Technology)
Category: Sensor
Keyword: 
multiprobe SFMparallel operationpiezoelectric cantilever arraypiezoelectric actuation
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