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The Impact Ionization Calculated by Monte Carlo Technique Masayoshi SHIRAHATA Norihiko KOTANI Yoichi AKASAKA | Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 1991/06/25
Vol. E74-C
No. 6
pp. 1656-1661
Type of Manuscript:
Special Section PAPER (Special Issue on Device and Process Simulation for Ultra Large Scale Integration) Category: Keyword:
| | Summary | Full Text:PDF(446.5KB) | |
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Oblique Rotating Ion Implantation Simulation for the Drain Formation of Gate/N- Overlapped LDD MOSFET's Using the Monte Carlo Method Tatsuya KUNIKIYO Masato FUJINAGA Tetsuya UCHIDA Norihiko KOTANI Yoichi AKASAKA | Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 1991/06/25
Vol. E74-C
No. 6
pp. 1662-1671
Type of Manuscript:
Special Section PAPER (Special Issue on Device and Process Simulation for Ultra Large Scale Integration) Category: Keyword:
| | Summary | Full Text:PDF(731.8KB) | |
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