Nobuo OWADA


Analysis of Localized Temperature Distribution in SOI Devices
Hizuru YAMAGUCHI Shigeki HIRASAWA Nobuo OWADA Nobuyoshi NATSUAKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/12/25
Vol. E75-C  No. 12  pp. 1438-1441
Type of Manuscript:  Special Section PAPER (Special Issue on SOI (Si on Insulator) Devices)
Category: SOI Devices
Keyword: 
numerical simulationtemperature distributionSOI structuretrench isolation
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