Nobuhiro IWASE


Influence of Film Characteristics on the Sputtering Rate of MgO
Souichirou HIDAKA Manabu ISHIMOTO Nobuhiro IWASE Keiichi BETSUI Hiroshi INOUE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/10/25
Vol. E82-C  No. 10  pp. 1804-1807
Type of Manuscript:  Special Section PAPER (Special Issue on Electronic Displays)
Category: 
Keyword: 
MgOPDPsputteringdensity
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