Mutsuo HIDAKA


Fabrication Process for Superconducting Digital Circuits
Mutsuo HIDAKA Shuichi NAGASAWA 
Publication:   
Publication Date: 2021/09/01
Vol. E104-C  No. 9  pp. 405-410
Type of Manuscript:  INVITED PAPER (Special Section on Fabrication of Superconductor Devices; Key Technology in Superconductor Electronics)
Category: 
Keyword: 
superconducting integrated circuitsJosephson junctionfabrication processcontrollabilityuniformitydefect density
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Planarized Nb 4-Layer Fabrication Process for Superconducting Integrated Circuits and Its Fabricated Device Evaluation
Shuichi NAGASAWA Masamitsu TANAKA Naoki TAKEUCHI Yuki YAMANASHI Shigeyuki MIYAJIMA Fumihiro CHINA Taiki YAMAE Koki YAMAZAKI Yuta SOMEI Naonori SEGA Yoshinao MIZUGAKI Hiroaki MYOREN Hirotaka TERAI Mutsuo HIDAKA Nobuyuki YOSHIKAWA Akira FUJIMAKI 
Publication:   
Publication Date: 2021/09/01
Vol. E104-C  No. 9  pp. 435-445
Type of Manuscript:  Special Section PAPER (Special Section on Fabrication of Superconductor Devices; Key Technology in Superconductor Electronics)
Category: 
Keyword: 
superconducting fabrication technologyNb/AlOx/Nb Josephson junctioncaldera planarizationmulti-layer structuresingle-flux quantum logicadiabatic quantum flux parametron logiccell-based designdiagnostic shift-registers
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Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation
Shuichi NAGASAWA Kenji HINODE Tetsuro SATOH Mutsuo HIDAKA Hiroyuki AKAIKE Akira FUJIMAKI Nobuyuki YOSHIKAWA Kazuyoshi TAKAGI Naofumi TAKAGI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2014/03/01
Vol. E97-C  No. 3  pp. 132-140
Type of Manuscript:  INVITED PAPER (Special Section on Leading-Edge Technology of Superconductor Large-Scale Integrated Circuits)
Category: 
Keyword: 
superconducting fabrication technologyNb/AlOx/Nb Josephson junctionsingle flux quantumplanarizationshift register
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Design and High-Speed Demonstration of Single-Flux-Quantum Bit-Serial Floating-Point Multipliers Using a 10kA/cm2 Nb Process
Xizhu PENG Yuki YAMANASHI Nobuyuki YOSHIKAWA Akira FUJIMAKI Naofumi TAKAGI Kazuyoshi TAKAGI Mutsuo HIDAKA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2014/03/01
Vol. E97-C  No. 3  pp. 188-193
Type of Manuscript:  Special Section PAPER (Special Section on Leading-Edge Technology of Superconductor Large-Scale Integrated Circuits)
Category: 
Keyword: 
floating point unitmultiplierLSRDPSFQ circuitsuperconductive integrated circuit
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FOREWORD
Mutsuo HIDAKA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2012/03/01
Vol. E95-C  No. 3  pp. 319-319
Type of Manuscript:  FOREWORD
Category: 
Keyword: 
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100 GHz Demonstrations Based on the Single-Flux-Quantum Cell Library for the 10 kA/cm2 Nb Multi-Layer Process
Yuki YAMANASHI Toshiki KAINUMA Nobuyuki YOSHIKAWA Irina KATAEVA Hiroyuki AKAIKE Akira FUJIMAKI Masamitsu TANAKA Naofumi TAKAGI Shuichi NAGASAWA Mutsuo HIDAKA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2010/04/01
Vol. E93-C  No. 4  pp. 440-444
Type of Manuscript:  Special Section PAPER (Special Section on Frontiers of Superconductive Electronics)
Category: Digital Applications
Keyword: 
single flux quantum circuitJosephson junctioncell libraryadder
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Improvements in Fabrication Process for Nb-Based Single Flux Quantum Circuits in Japan
Mutsuo HIDAKA Shuichi NAGASAWA Kenji HINODE Tetsuro SATOH 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/03/01
Vol. E91-C  No. 3  pp. 318-324
Type of Manuscript:  INVITED PAPER (Special Section on Recent Progress in Superconductive Digital Electronics)
Category: 
Keyword: 
superconductive circuitJosephson junctionfabrication processSFQ (Single Flux Quantum) circuitNb/AlOx/Nb junction
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Pattern-Size-Free Planarization for Multilayered Large-Scale SFQ Circuits
Kenji HINODE Shuichi NAGASAWA Masao SUGITA Tetsuro SATOH Hiroyuki AKAIKE Yoshihiro KITAGAWA Mutsuo HIDAKA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/12/01
Vol. E86-C  No. 12  pp. 2511-2513
Type of Manuscript:  LETTER
Category: Superconductive Electronics
Keyword: 
planarizationreversal maskNb SFQmultilevel wiring
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Fabrication Processes for High-Tc Superconducting Integrated Circuits Based on Edge-Type Josephson Junctions
Tetsuro SATOH Mutsuo HIDAKA Shuichi TAHARA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1998/10/25
Vol. E81-C  No. 10  pp. 1532-1537
Type of Manuscript:  INVITED PAPER (Special Issue on Low- and High-Temperature Superconductive Electron Devices and Their Applications)
Category: High-Tc Junction Technology
Keyword: 
YBa2Cu3OxPrBa2Cu3OxJosephson junctionintegrated circuitgroundplane
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A High-Tc Superconductor Josephson Sampler
Mutsuo HIDAKA Tetsuro SATOH Hirotaka TERAI Shuichi TAHARA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/10/25
Vol. E80-C  No. 10  pp. 1226-1232
Type of Manuscript:  INVITED PAPER (Special Issue on Basic Properties and Applications of Superconductive Electron Devices)
Category: 
Keyword: 
high-Tc superconductorramp-edge junctionsamplerintegrated circuitgroundplane
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