Mitsuhiro SUGIYAMA


An Advanced BSG Self-Aligned (A-BSA) Transistor Technology for High Speed IC Implementation
Tsutomu TASHIRO Mitsuhiro SUGIYAMA Hisashi TAKEMURA Chihiro OGAWA Masakazu KURISU Hideki KITAHATA Takenori MORIKAWA Masahiko NAKAMAE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/12/25
Vol. E79-C  No. 12  pp. 1733-1740
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
bipolar transistorself-alignedcutoff frequencymaximum frequency of oscillationCVD BSGdevice design
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