Michiaki MURATA

High Resolution Long Array Thermal Ink Jet Printhead with On-Chip LSI Heater Plate and Micromachined Si Channel Plate
Michiaki MURATA Masaki KATAOKA Regan NAYVE Atsushi FUKUGAWA Yoshihisa UEDA Tohru MIHARA Masahiko FUJII Toshimichi IWAMORI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2001/12/01
Vol. E84-C  No. 12  pp. 1792-1800
Type of Manuscript:  Special Section PAPER (Special Issue on Integrated Systems with New Concepts)
thermal ink jetmicromachiningdrop ejectorreactive ion etchingelectrostatic bonding
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