Mayumi B. TAKEYAMA


Thermal Stability of W2N Compound Barrier in W/W2N/poly-Si Gate Electrode Configuration
Atsushi NOYA Mayumi B. TAKEYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/11/01
Vol. E86-C  No. 11  pp. 2332-2335
Type of Manuscript:  LETTER
Category: Electronic Materials
Keyword: 
metallizationMOSgate electrodeWNx
 Summary | Full Text:PDF(184.3KB)

Thermal Stability of ZrN Barrier in W/ZrN/poly-Si Gate Electrode Configuration
Atsushi NOYA Mayumi B. TAKEYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2001/05/01
Vol. E84-C  No. 5  pp. 704-706
Type of Manuscript:  LETTER
Category: Electronic Materials
Keyword: 
metallizationMOSgate electrodeZrN
 Summary | Full Text:PDF(5.3MB)