Masaki TAKEUCHI


High Speed Crystallization of a-Si by Lateral Sweep Annealing in Steep Temperature Gradient
Akio KITAGAWA Masaki TAKEUCHI Sadaki FUTAGI Syungo KANAI Kazunori TUBOTA Yasuhiro KIZU Masakuni SUZUKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/09/25
Vol. E75-C  No. 9  pp. 1031-1035
Type of Manuscript:  Special Section PAPER (Special Issue on Silicon Devices and Materials)
Category: 
Keyword: 
SIO structurecrystallizationpoly-Si filmgas flame annealingsolid phase epitaxy
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