Koji URABE


Effects of Field Edge Steps on Electrical Gate Linewidth Measurements
Naoki KASAI Ichiro YAMAMOTO Koji URABE Kuniaki KOYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/02/25
Vol. E79-C  No. 2  pp. 152-157
Type of Manuscript:  Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category: Device and Circuit Characterization
Keyword: 
test structureMOSFETlinewidthfield step
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