Koichi TSUZUKI


2D Simulation of Particle Formation, Growth, and Deposition in Low-Pressure CVDs: Application of CONTAMINATE Version 2.0
Evan WHITBY Koichi TSUZUKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/07/25
Vol. E75-C  No. 7  pp. 852-859
Type of Manuscript:  Special Section PAPER (Special Issue on Ultra Clean Technology)
Category: 
Keyword: 
semiconductor materials and devicesmaterialsparticle dynamicswafer contamination
 Summary | Full Text:PDF(796KB)

Contamination Control in Low-Pressure Process Equipment
Koichi TSUZUKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/07/25
Vol. E75-C  No. 7  pp. 860-865
Type of Manuscript:  Special Section PAPER (Special Issue on Ultra Clean Technology)
Category: 
Keyword: 
particulate contaminationsemiconductorlow-pressure processingparticle dynamics
 Summary | Full Text:PDF(456.1KB)