Koichi MURO


Fabrication of Rugate Optical Filters Using a-SiOx:H Thin Films
Hidehiko YODA Koichi MURO Kazuo SHIRAISHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/10/01
Vol. E91-C  No. 10  pp. 1639-1643
Type of Manuscript:  Special Section PAPER (Special Section on Functional Thin Films for Optical Applications)
Category: 
Keyword: 
rugate optical filtera-SiOxH thin filmRF magnetron sputteringripple
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