Kiyohiko KAWANO


Electrostatically Actuated Two-Dimensional Optical Scanner Having a High Resonant Frequency Ratio of Fast/Slow Axes
Hiroshi NOGE Yosuke HAGIHARA Kiyohiko KAWANO Hideki UEDA Takaaki YOSHIHARA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/10/01
Vol. E91-C  No. 10  pp. 1611-1615
Type of Manuscript:  INVITED PAPER (Special Section on Electronic Displays)
Category: 
Keyword: 
MEMSvertical comb driveoptical scannermicro mirrorlaser display
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