Kensaku KANOMATA

Room-Temperature Atomic Layer Deposition of SnO2 Using Tetramethyltin and Its Application to TFT Fabrication
Kentaro TOKORO Shunsuke SAITO Kensaku KANOMATA Masanori MIURA Bashir AHMMAD Shigeru KUBOTA Fumihiko HIROSE 
Publication:   
Publication Date: 2018/05/01
Vol. E101-C  No. 5  pp. 317-322
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
ALD, SnO2, IR absorption spectroscopy, TFT, 
 Summary | Full Text:PDF
Nitrogen Adsorption of Si(100) Surface by Plasma Excited Ammonia
P. Pungboon PANSILA Kensaku KANOMATA Bashir AHMMAD Shigeru KUBOTA Fumihiko HIROSE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2015/05/01
Vol. E98-C  No. 5  pp. 395-401
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
Plasma, plasma excited NH3, IR absorption spectroscopy, XPS, 
 Summary | Full Text:PDF
Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy
P. Pungboon PANSILA Kensaku KANOMATA Bashir AHMMAD Shigeru KUBOTA Fumihiko HIROSE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2015/05/01
Vol. E98-C  No. 5  pp. 382-389
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
Gallium oxide, trimethylgallium, remote plasma, IR absorption spectroscopy, adsorption, oxidization, 
 Summary | Full Text:PDF
Fabrication of β-FeSi2 Films on Si(111) Using Solid-Phase Growth Reaction from Fe and FeSi Sources
Katsuaki MOMIYAMA Kensaku KANOMATA Shigeru KUBOTA Fumihiko HIROSE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2013/05/01
Vol. E96-C  No. 5  pp. 690-693
Type of Manuscript:  BRIEF PAPER
Category: 
Keyword: 
β-FeSi2, silicide, solid phase growth, RHEED, 
 Summary | Full Text:PDF
Robust Design Method of Multilayer Antireflection Coating for Organic Solar Cells
Shigeru KUBOTA Kensaku KANOMATA Katsuaki MOMIYAMA Takahiko SUZUKI Fumihiko HIROSE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2013/04/01
Vol. E96-C  No. 4  pp. 604-611
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
organic solar cell, multilayer antireflection coating, optimization, optical simulation, 
 Summary | Full Text:PDF