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Precise Control of Grating Pitch by Electron-Beam Exposure System for Integrated Optics Kazuhito FURUYA Kenji YOSHIDA Kimiyasu HONJO Yasuharu SUEMATSU | Publication: IEICE TRANSACTIONS (1976-1990)
Publication Date: 1983/09/25
Vol. E66-E
No. 9
pp. 561-562
Type of Manuscript:
LETTER Category: Optical and Quantum Electronics Keyword:
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