Kenji KONDO


Self-Aligned Planar Metal Double-Gate Polycrystalline-Silicon Thin-Film Transistors Fabricated at Low Temperature on Glass Substrate
Hiroyuki OGATA Kenji ICHIJO Kenji KONDO Akito HARA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2013/02/01
Vol. E96-C  No. 2  pp. 285-288
Type of Manuscript:  BRIEF PAPER
Category: Semiconductor Materials and Devices
Keyword: 
poly-SiTFTdouble-gateglass substrate
 Summary | Full Text:PDF

Application of KrF Excimer Laser Lithography to 256 MbDRAM Fabrication
Sin-ichi FUKUZAWA Hiroshi YOSHINO Shinji ISHIDA Kenji KONDOH Tsuyoshi YOSHII Naoaki AIZAKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/11/25
Vol. E76-C  No. 11  pp. 1665-1669
Type of Manuscript:  Special Section LETTER (Special Issue on LSI Memories)
Category: Application Specific Memory
Keyword: 
DRAMKrF excimer laserlithography double-layer resisttriple-layer resist
 Summary | Full Text:PDF