Kenji HINODE

Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation
Shuichi NAGASAWA Kenji HINODE Tetsuro SATOH Mutsuo HIDAKA Hiroyuki AKAIKE Akira FUJIMAKI Nobuyuki YOSHIKAWA Kazuyoshi TAKAGI Naofumi TAKAGI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2014/03/01
Vol. E97-C  No. 3  pp. 132-140
Type of Manuscript:  INVITED PAPER (Special Section on Leading-Edge Technology of Superconductor Large-Scale Integrated Circuits)
Category: 
Keyword: 
superconducting fabrication technology, Nb/AlOx/Nb Josephson junction, single flux quantum, planarization, shift register, 
 Summary | Full Text:PDF
Improvements in Fabrication Process for Nb-Based Single Flux Quantum Circuits in Japan
Mutsuo HIDAKA Shuichi NAGASAWA Kenji HINODE Tetsuro SATOH 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/03/01
Vol. E91-C  No. 3  pp. 318-324
Type of Manuscript:  INVITED PAPER (Special Section on Recent Progress in Superconductive Digital Electronics)
Category: 
Keyword: 
superconductive circuit, Josephson junction, fabrication process, SFQ (Single Flux Quantum) circuit, Nb/AlOx/Nb junction, 
 Summary | Full Text:PDF
Pattern-Size-Free Planarization for Multilayered Large-Scale SFQ Circuits
Kenji HINODE Shuichi NAGASAWA Masao SUGITA Tetsuro SATOH Hiroyuki AKAIKE Yoshihiro KITAGAWA Mutsuo HIDAKA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/12/01
Vol. E86-C  No. 12  pp. 2511-2513
Type of Manuscript:  LETTER
Category: Superconductive Electronics
Keyword: 
planarization, reversal mask, Nb SFQ, multilevel wiring, 
 Summary | Full Text:PDF