Kazushi HAYASHI

In-line Process Monitoring for Amorphous Oxide Semiconductor TFT Fabrication using Microwave-detected Photoconductivity Decay Technique
Hiroshi GOTO Hiroaki TAO Shinya MORITA Yasuyuki TAKANASHI Aya HINO Tomoya KISHI Mototaka OCHI Kazushi HAYASHI Toshihiro KUGIMIYA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2014/11/01
Vol. E97-C  No. 11  pp. 1055-1062
Type of Manuscript:  INVITED PAPER (Special Section on Electronic Displays)
Category: 
Keyword: 
oxide semiconductor, thin film transistor, microwave-detected photoconductivity decay, in-line process monitoring, 
 Summary | Full Text:PDF(2.1MB)
Application of Microwave Photoconductivity Decay Method to Characterization of Amorphous In-Ga-Zn-O Films
Satoshi YASUNO Takashi KITA Shinya MORITA Aya HINO Kazushi HAYASHI Toshihiro KUGIMIYA Shingo SUMIE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2012/11/01
Vol. E95-C  No. 11  pp. 1724-1729
Type of Manuscript:  INVITED PAPER (Special Section on Electronic Displays)
Category: 
Keyword: 
microwave photoconductivity decay, a-IGZO, oxide semiconductor, photoconductivity response, 
 Summary | Full Text:PDF(1.8MB)