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Proximity Effect Correction in EB Lithography Using Pattern Shape Adjustment Techniques Naoshi SUGIYAMA Kazunori SAITOH | Publication: IEICE TRANSACTIONS (1976-1990)
Publication Date: 1980/03/25
Vol. E63-E
No. 3
pp. 198-203
Type of Manuscript:
PAPER Category: Integrated Circuits Keyword:
| | Summary | Full Text:PDF(481.6KB) | |
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