| Kazuhiko TSUJI
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A New Technique for Evaluating Gate Oxide Reliability Using a Photon Emission Method Yukiharu URAOKA Kazuhiko TSUJI | Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 1993/04/25
Vol. E76-C
No. 4
pp. 519-524
Type of Manuscript:
Special Section PAPER (Special Issue on Sub-Half Micron Si Device and Process Technologies) Category: Device Technology Keyword: reliability, photon emission, TDDB, gate oxide, LOCOS, | | Summary | Full Text:PDF | |
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