Katsuhiro TSUKAMOTO


Process and Device Technologies for Subhalf-Micron LSI Memory
Katsuhiro TSUKAMOTO Hiroaki MORIMOTO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/08/25
Vol. E77-C  No. 8  pp. 1343-1350
Type of Manuscript:  INVITED PAPER (Special Section on High Speed and High Density Multi Functional LSI Memories)
Category: General Technology
Keyword: 
LSI memorylithographyetchingMOS transistordielectric material
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Deep Submicron Field Isolation with Buried Insulator between Polysilicon Electrodes (BIPS)
Masahiro SHIMIZU Masahide INUISHI Katsuhiro TSUKAMOTO Hideaki ARIMA Hirokazu MIYOSHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/08/25
Vol. E77-C  No. 8  pp. 1369-1376
Type of Manuscript:  Special Section PAPER (Special Section on High Speed and High Density Multi Functional LSI Memories)
Category: General Technology
Keyword: 
isolationparasitic field transistorMOSFET
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A Novel CMOS Structure with Polysilicon Source/Drain (PSD) Transistors by Self-Aligned Silicidation
Masahiro SHIMIZU Takehisa YAMAGUCHI Masahide INUISHI Katsuhiro TSUKAMOTO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/04/25
Vol. E76-C  No. 4  pp. 532-540
Type of Manuscript:  Special Section PAPER (Special Issue on Sub-Half Micron Si Device and Process Technologies)
Category: Device Technology
Keyword: 
MOS transistorshallow junctionsalicidetitanium
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Hot-Carrier Reliability in Submicrometer Ultra-Thin SOI-MOSFET's
Yasuo YAMAGUCHI Masahiro SHIMIZU Yasuo INOUE Tadashi NISHIMURA Katsuhiro TSUKAMOTO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/12/25
Vol. E75-C  No. 12  pp. 1465-1470
Type of Manuscript:  Special Section PAPER (Special Issue on SOI (Si on Insulator) Devices)
Category: Hot Carrier
Keyword: 
thin SOIhot-carrierSIMOXgate-overlapped LDD
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Two-Dimensional Device Simulation of 0.1 µm Thin-Film SOI MOSFET's
Hans-Oliver JOACHIM Yasuo YAMAGUCHI Kiyoshi ISHIKAWA Norihiko KOTANI Tadashi NISHIMURA Katsuhiro TSUKAMOTO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/12/25
Vol. E75-C  No. 12  pp. 1498-1505
Type of Manuscript:  Special Section PAPER (Special Issue on SOI (Si on Insulator) Devices)
Category: Deep Sub-micron SOI CMOS
Keyword: 
thin-film SOI MOSFET'sminiaturized devicesdevice simulation
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Mechanism of Bit Line Mode Soft Error for DRAM
Mikio ASAKURA Yoshio MATSUDA Katsuhiro TSUKAMOTO Kazuyasu FUJISHIMA Tsutomu YOSHIHARA 
Publication:   IEICE TRANSACTIONS (1976-1990)
Publication Date: 1987/11/25
Vol. E70-E  No. 11  pp. 1060-1061
Type of Manuscript:  Special Section LETTER (Special Issue: Papers from 1987 National Conference on Semicondutor Devices and Materials IEICE)
Category: Semiconductor Devices
Keyword: 
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