Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2000/08/25 Vol. E83-CNo. 8pp. 1259-1266 Type of Manuscript: Special Section PAPER (Special Issue on 1999 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'99)) Category: Process Modeling and Simulation Keyword: ion implantation, three-dimensional, Monte-Carlo, analytical, simulation,
Control and Improvement of Surface Triangulation for Three-Dimensional Process Simulation Eberhard BARJurgen LORENZ
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2000/08/25 Vol. E83-CNo. 8pp. 1338-1342 Type of Manuscript: Special Section PAPER (Special Issue on 1999 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'99)) Category: Numerics Keyword: semiconductor technology, process simulation, surface triangulation, grid generation,
