Junji TANIMURA


Effects of Post-Annealing on Dielectric Properties of (Ba, Sr)TiO3 Thin Films Prepared by Liquid Source Chemical Vapor Deposition
Tsuyoshi HORIKAWA Junji TANIMURA Takaaki KAWAHARA Mikio YAMAMUKA Masayoshi TARUTANI Kouichi ONO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1998/04/25
Vol. E81-C  No. 4  pp. 497-504
Type of Manuscript:  Special Section PAPER (Special Issue on Advanced Memory Devices Using High-Dielectric-Constant and Ferroelectric Thin Films)
Category: 
Keyword: 
chemical vapor deposition(Ba,Sr)TiO3annealingdielectric constantdielectric breakdown
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