| Jun GAO
|
|
|
|
|
|
|
Modulation of PtSi Work Function by Alloying with Low Work Function Metal Jun GAO Jumpei ISHIKAWA Shun-ichiro OHMI | Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 2011/05/01
Vol. E94-C
No. 5
pp. 775-779
Type of Manuscript:
Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices) Category: Keyword: PtSi, monosilicide, alloy, work function, SWC-anneal, | | Summary | Full Text:PDF(960.1KB) | |
|
|